ONETEST 欢迎您

厂商登录 | 入驻

登录 | 注册 购物车 微信公众号
仪器资源库

严选商城

搜索

AI问答与智能搜索
二维码
请完成安全验证
产品库 严选商城

    类似产品

    同厂商产品

    The HPMS series integrates a high-voltage power supply and a voltage divider network into a compact socket designed for side-on photomultiplier tubes (PMTs). This all-in-one design eliminates the need for external high-voltage wir。
    The HJPSS series is a benchtop size, high-performance, high-voltage power supply that combines space-saving and superior performance. Despite its compact width of 4.13-inch (105 mm), it can output high voltages of up to 5 kV with 。
    The HIB series is a multi-channel high-voltage power supply designed specifically for demanding ion beam applications, including Focused Ion Beam (FIB) systems. This series integrates multiple power sources required for an ion bea。
    • «
    • 1

    HECD 静电吸盘电源|松田精密 (在产)

    The HECD series is a programmable high-voltage power supply designed specifically for electrostatic chuck (ESC) applications. It features dual-channel floating outputs with polarity switching and forced grounding capabilities. The。

    参考价格 ：

    厂家：松田精密|Matsusada Precision Inc. （收录2330个产品）

    产地：日本

    点击访问厂家官网

    产品描述
    详细指标
    软件和手册|白皮书
    购买渠道
    选件
    问大家
    视频
    测评
    口碑
    系统与解决方案

    Matsusada Precision Inc. · 直流电源

    HECD 静电吸盘电源

    ±0.5 to ±7.5 kV · 1 to 20 mA
    产品定位

    The HECD series is a programmable high-voltage power supply designed specifically for electrostatic chuck (ESC) applications. It features dual-channel floating outputs with polarity switching and forced grounding capabilities. The integrated wafer monitoring system ensures reliable chucking status detection. With a wide voltage range,

    the HECD series supports both Coulombic and Johnsen-Rahbek type electrostatic chucks.

    核心参数
    ·
    – Model ｜Output ｜Output Response speed [typical] (-90%⇔+90% * 2 )
    ·
    – Voltage Max * 1 (each channel)；Current (each channel)
    · HECD-0.5B20×2：+0.5kV, -0.5kV；20 mA；10 ms
    · HECD-1B10×2：+1kV, -1kV；10 mA；10 ms
    · HECD-1.5B6×2：+1.5kV, -1.5kV；6 mA；15 ms
    · HECD-2B5×2：+2kV, -2kV；5 mA；20 ms
    · HECD-4B1×2：+4kV, -4kV；1 mA；40 ms
    · HECD-4B2.5×2：+4kV, -4kV；2.5 mA；40 ms
    · HECD-5B2×2：+5kV, -5kV；2 mA；60 ms
    · HECD-7.5B1.2×2：+7.5kV, -7.5kV；1.2 mA；90 ms
    功能与特点
    · Compact half-rack size design
    · Polarity reversal enables increased throughput with quick dechucking
    · Reliable chucking and release status detection via wafer sensor
    · Fast response due to amplifier architecture design (high reliability and long life with “non-relay polarity reverse” design).
    · Optional independent dual-channel control and center-tap voltage setting for versatile operation
    · Digital interface options: LAN, USB, RS-232C, or EtherCAT
    · Built-in 13.56 MHz RF filter
    · Selectable models optimized for various wafer sizes and applications
    典型应用
    · 器件供电
    资源下载
    · 本页仅列出核心参数，完整技术指标请见 HECD-specs.html
    Matsusada Precision Inc. · onetest 仪器资源库
    本文由 onetest 仪器资源库依据厂商公开资料整理，参数以厂商正式资料为准。

     

     

    Matsusada Precision Inc. · 直流电源

    HECD 静电吸盘电源 · 详细指标

    ±0.5 to ±7.5 kV · 1 to 20 mA
    产品简介

    The HECD series is a programmable high-voltage power supply designed specifically for electrostatic chuck (ESC) applications. It features dual-channel floating outputs with polarity switching and forced grounding capabilities. The integrated wafer monitoring system ensures reliable chucking status detection. With a wide voltage range,

    the HECD series supports both Coulombic and Johnsen-Rahbek type electrostatic chucks.

    完整技术指标
    ·
    – Model ｜Output ｜Output Response speed [typical] (-90%⇔+90% * 2 )
    ·
    – Voltage Max * 1 (each channel)；Current (each channel)
    · HECD-0.5B20×2：+0.5kV, -0.5kV；20 mA；10 ms
    · HECD-1B10×2：+1kV, -1kV；10 mA；10 ms
    · HECD-1.5B6×2：+1.5kV, -1.5kV；6 mA；15 ms
    · HECD-2B5×2：+2kV, -2kV；5 mA；20 ms
    · HECD-4B1×2：+4kV, -4kV；1 mA；40 ms
    · HECD-4B2.5×2：+4kV, -4kV；2.5 mA；40 ms
    · HECD-5B2×2：+5kV, -5kV；2 mA；60 ms
    · HECD-7.5B1.2×2：+7.5kV, -7.5kV；1.2 mA；90 ms
    · ：Model ｜Output ｜Successor
    · ：Voltage；Current
    · HECD-0.5B10×2：+0.5kV, -0.5kV；10 mA；HECD-0.5B20×2
    · HECD-1B3×2：+1kV, -1kV；3 mA；HECD-1B10×2
    · HECD-1.5B2×2：+1.5kV, -1.5kV；2 mA；HECD-1.5B6×2
    · HECD-2B3×2：+2kV, -2kV；3 mA；HECD-2B5×2
    ·
    – Standard 0.5 kV to 5 kV model ｜CN-SHV-HVPP (5) (with SHV connector on both end) ｜5 meters *When -L(7m) option is selected, CN-SHV-HVPP(7) is applied.
    · Standard 7.5 kV model
    – CN-SHV7.5-HVPP (5) (with SHV connector on both end)；5 meters
    以上指标摘自厂商官方网站产品页/公开技术资料；厂商未标注测试条件与典型值口径的条目均按原文收录，实际以厂商正式规格书为准。
    资源下载
    Matsusada Precision Inc. · onetest 仪器资源库
    本文由 onetest 仪器资源库依据厂商公开资料整理，参数以厂商正式资料为准。

    全部

     

    松田精密官方渠道


    厂家联系方式

    公司：Matsusada Precision Inc.（松田精密株式会社）

    国际/日本：TEL +81-6-6150-5088　FAX +81-6-6150-5089

    美国（北卡罗来纳）：TEL (704) 496-2644　FAX (704) 496-2643


     

    0条提问

    X

    提问

    X

    回答

    暂无视频

     

    0条口碑
    X

    发表口碑

    口碑标题
    上传图片

    ONETEST仪器资源库

    合作与收录

    联系电话：+86-755-23033660

    电子邮箱：info@onetest.cn

    Onetest仪器资源库

    公众号

    Onetest仪器资源库

    视频号

    Onetest仪器资源库

    bilibili

    Onetest仪器资源库

    小助手

    © 2026 Onetest仪器资源库 All Rights Reserved   粤ICP备17028186号-2      粤公网安备44030902003758

    AI问答