产品定位
The HIB series is a multi-channel high-voltage power supply designed specifically for demanding ion beam applications,
including Focused Ion Beam (FIB) systems. This series integrates multiple power sources required for an ion beam column accelerator,
filament, suppressor, extractor,
and lens into a single compact chassis. This all-in-one design simplifies system integration and minimizes high-voltage wiring,
resulting in improved system stability and reduced noise susceptibility. Optimized for high performance,
the HIB series features ultra-low ripple and high stability,
enabling precise control of the ion beam for high-resolution imaging and fine processing. While the standard platform supports acceleration voltages up to 60 kV,
the system offers extensive customization options to match specific ion source and column requirements.
核心参数
· :Model |Ch.Name |Reference level |Output
· :Voltage;Current
· HIB series
– Filament
– Accelerator
– +2 V, +5 V, +6 V, +8 V
– 3 A, 5 A
·
– Suppressor
– Accelerator
– -300 V, -600 V, -1 kV, -2 kV
– 50 µA, 100 µA
·
– Extractor
– Accelerator
– -10 kV, -12 kV, -15 kV
– 500 µA
·
– Lens1;Accelerator;+15 kV, +10 kV, +5 kV, -5 kV, -10 kV, -15 kV;50 µA
·
– Accelerator
– Ground
– +10 kV, +15kV, +30 kV, +40kV, +50 kV, +60 kV
– 100 µA, 250 µA, 300 µA, 500 µA, 700 µA, 750 µA
· :Lens2;Ground;-30 kV, +30 kV;50 µA
· :Lens3;Ground;-30 kV, +30 kV;50 µA
功能与特点
· Integrated Solution for FIB: Provides multiple outputs for the accelerator, filament, suppressor, extractor, and lens in a single unit.
· Customizable Configuration: Select the optimal electrode power supply configuration for your specific ion gun.
· High Performance: Ultra-low ripple and high stability for precision applications.
· Temperature Stability: Low temperature coefficient of 25 ppm/°C (10 ppm/°C models available as an option).
· Floating Outputs: Four programmable channels, each equipped with voltage and current monitors.
· Ground Output: One programmable channel with voltage and current monitors.
· Safety and Control: Fiber-optic galvanic isolation ensures safe remote control operation.
· Extended Range: Acceleration voltage up to 100 kV available upon request.
典型应用
· 实验室供电
资源下载
· 本页仅列出核心参数,完整技术指标请见 HIB-specs.html