ONETEST 欢迎您

厂商登录 | 入驻

登录 | 注册 购物车 微信公众号
仪器资源库

严选商城

搜索

AI问答与智能搜索
二维码
请完成安全验证
产品库 严选商城

    类似产品

    同厂商产品

    The EJ series features reversible polarity that can be controlled using a knob on the front panel. This allows users to switch output polarity safely and easily without the need for rewiring, significantly improving efficiency dur。
    Bipolar high-voltage output, dual-channel benchtop power supply
    The ECA series is a high-voltage power supply engineered specifically for electrostatic chuck (E-Chuck) applications. It enables wafer holding and releasing via DC output control, with smooth release achieved through polarity reve。
    • «
    • 1

    EC 静电吸盘电源|松田精密 (在产)

    The EC series is a high-voltage power supply specifically designed for electrostatic chuck (E-Chuck) applications. It features two output channels, allowing a single unit to support both unipolar and bipolar systems. The polarity 。

    参考价格 ：

    厂家：松田精密|Matsusada Precision Inc. （收录2330个产品）

    产地：日本

    点击访问厂家官网

    产品描述
    详细指标
    软件和手册|白皮书
    购买渠道
    选件
    问大家
    视频
    测评
    口碑
    系统与解决方案

    Matsusada Precision Inc. · 直流电源

    EC 静电吸盘电源

    Models ｜Output · 0 to ±1 kV；200 mA · 0 to ±3 kV；67 mA · 0 to ±5 kV；40 mA
    Models ｜Output
    0 to ±1 kV；200 mA
    EC-1R200 x 2
    0 to ±3 kV；67 mA
    EC-3R67 x 2
    0 to ±5 kV；40 mA
    EC-5R40 x 2
    0 to ±6 kV；33 mA
    EC-6R33 x 2
    0 to ±10 kV；20 mA
    EC-10R20 x 2
    产品定位

    The EC series is a high-voltage power supply specifically designed for electrostatic chuck (E-Chuck) applications. It features two output channels,

    allowing a single unit to support both unipolar and bipolar systems. The polarity reversal function ensures smooth wafer release. With a voltage range from ±1 kV to ±10 kV,

    the series is compatible with both Johnsen-Rahbek and Coulomb type chucks.

    核心参数
    · ：Models ｜Output
    · ：Voltage (each channel)；Current (each channel)
    · EC-1R200 x 2：0 to ±1 kV；200 mA
    · EC-3R67 x 2：0 to ±3 kV；67 mA
    · EC-5R40 x 2：0 to ±5 kV；40 mA
    · EC-6R33 x 2：0 to ±6 kV；33 mA
    · EC-10R20 x 2：0 to ±10 kV；20 mA
    ·
    – Standard 115 V input ｜CABLE TYPE1 ｜125 V / 10 A ｜2.5 meters Fixed length
    · Standard -L(220V)/-L(230V) option
    – CABLE TYPE3
    – 250 V / 10 A
    – 2.5 meters Fixed length
    · Standard [6 kV and 10 kV models]
    – CN-BNC-HVPP (5) *：CN-15-MHVP (5) *
    – MHV connectors on both ends：Flying lead
    – Standard is "5 meters".：Standard is "5 meters".
    功能与特点
    · Optimized for Electrostatic Chuck (E-Chuck/ESC) applications
    · Dual-channel output: Supports bipolar systems with a single unit
    · Reversible output: Polarity reversal function enables smooth wafer release
    · Smooth release of the wafer with polarity reverse function
    · Compact design with high power
    典型应用
    · 实验室供电
    资源下载
    · 本页仅列出核心参数，完整技术指标请见 EC-specs.html
    Matsusada Precision Inc. · onetest 仪器资源库
    本文由 onetest 仪器资源库依据厂商公开资料整理，参数以厂商正式资料为准。

     

     

    Matsusada Precision Inc. · 直流电源

    EC 静电吸盘电源 · 详细指标

    Models ｜Output · 0 to ±1 kV；200 mA · 0 to ±3 kV；67 mA · 0 to ±5 kV；40 mA
    产品简介

    The EC series is a high-voltage power supply specifically designed for electrostatic chuck (E-Chuck) applications. It features two output channels,

    allowing a single unit to support both unipolar and bipolar systems. The polarity reversal function ensures smooth wafer release. With a voltage range from ±1 kV to ±10 kV,

    完整技术指标
    · ：Models ｜Output
    · ：Voltage (each channel)；Current (each channel)
    · EC-1R200 x 2：0 to ±1 kV；200 mA
    · EC-3R67 x 2：0 to ±3 kV；67 mA
    · EC-5R40 x 2：0 to ±5 kV；40 mA
    · EC-6R33 x 2：0 to ±6 kV；33 mA
    · EC-10R20 x 2：0 to ±10 kV；20 mA
    ·
    – Standard 115 V input ｜CABLE TYPE1 ｜125 V / 10 A ｜2.5 meters Fixed length
    · Standard -L(220V)/-L(230V) option
    – CABLE TYPE3
    – 250 V / 10 A
    – 2.5 meters Fixed length
    · Standard [6 kV and 10 kV models]
    – CN-BNC-HVPP (5) *：CN-15-MHVP (5) *
    – MHV connectors on both ends：Flying lead
    – Standard is "5 meters".：Standard is "5 meters".
    以上指标摘自厂商官方网站产品页/公开技术资料；厂商未标注测试条件与典型值口径的条目均按原文收录，实际以厂商正式规格书为准。
    资源下载
    Matsusada Precision Inc. · onetest 仪器资源库
    本文由 onetest 仪器资源库依据厂商公开资料整理，参数以厂商正式资料为准。

    全部

     

    松田精密官方渠道


    厂家联系方式

    公司：Matsusada Precision Inc.（松田精密株式会社）

    国际/日本：TEL +81-6-6150-5088　FAX +81-6-6150-5089

    美国（北卡罗来纳）：TEL (704) 496-2644　FAX (704) 496-2643


     

    0条提问

    X

    提问

    X

    回答

    暂无视频

     

    0条口碑
    X

    发表口碑

    口碑标题
    上传图片

    ONETEST仪器资源库

    合作与收录

    联系电话：+86-755-23033660

    电子邮箱：info@onetest.cn

    Onetest仪器资源库

    公众号

    Onetest仪器资源库

    视频号

    Onetest仪器资源库

    bilibili

    Onetest仪器资源库

    小助手

    © 2026 Onetest仪器资源库 All Rights Reserved   粤ICP备17028186号-2      粤公网安备44030902003758

    AI问答