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E5270B 分析仪 Upto8|是德科技 (在产)

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是德科技|KEYSIGHT
精密 IV 分析仪/8 插槽精密测量主机箱
用于器件表征的 IV 测量系统
产品简介
是德科技 E5270B 精密 IV 分析仪是用于各种材料和器件电流-电压表征的完整解决方案,电流测量性能低至 0.1 fA
核心参数
• 最大输出电流:1 A
• 最大输出电压:200 V
• 最小电压测量分辨率:0.5 µV
• 最小电流测量分辨率:0.1 fA
• 通道数:Up to 8
功能特性
• 电流-电压测量能力
0.1 fA – 1 A 和 0.5 µV – 200 V 的精确测量量程
单点与扫描测量功能
最小 500 µs 脉宽的单点与扫描脉冲测量
ASU(atto-sense and switch unit,阿托传感与开关单元)可与 HRSMU 配合使用,
提供 0.1 fA 测量分辨率和 SMU/AUX 路径切换
• EasyEXPERT group+ 软件
表征环境可在用户 PC 上使用
基于直观 GUI 的操作,支持键盘和鼠标操作
多种测量模式,便于快速设置和执行测量(应用测试、经典测试和快速测试)
图形显示、自动分析功能,以及数据生成至 Excel 和图像用于分析和报告
• E5270B 硬件
可配置且可升级的测量模块,最多 8 个插槽
可选配高分辨率源表(HRSMU)、中等功率源表(MPSMU)和高功率源表(HPSMU),用于灵活选择源表配置,HRSMU 支持选配 ASU
所有已安装模块均可使用高分辨率与高速模数转换器(ADC)
主机内置有源接地单元(GNDU),可施加 0 V 并吸收最高 4 A 电流
Keysight E5270B 精密 IV 分析仪是对各类材料与器件进行电流-电压特性分析的完整解决方案。
E5270B 支持多个源表/监测单元(SMU),可实现电压/电流施加与电压/电流测量,电流测量分辨率低至 0.1 fA。
其模块化架构允许您在 8 个可用插槽中配置或升级 SMU 模块。
随机提供 EasyEXPERT group+ 图形化表征软件,并可在您的 PC 上使用,支持从测量设置到数据分析的表征全流程任务。
SMU 的多功能测量能力与图形化表征软件的高效集成,使 E5270B 成为器件、材料、半导体、
有源/无源元件乃至几乎任何类型电子器件表征与评估的理想解决方案,同时确保测量可靠性与效率不受妥协。
Keysight EasyEXPERT group+ 支持从测量设置与执行到分析与数据管理的完整表征流程,
既可交互式手动操作,也可配合半自动晶圆探针台实现整片晶圆的自动化操作,从而实现高效且可重复的器件表征。
EasyEXPERT group+ 通过内置的即用型测量(应用测试)让电流-电压表征可立即开展,
并允许您在每次测量后自动将测试条件与测量数据存入独特的内置数据库(工作区),确保宝贵信息不会丢失,
且后续可重复执行测量。
凭借这些多功能特性,Keysight E5270B 为电流-电压表征提供完整解决方案。
除作为分析仪使用外,E5270B 还可作为机架与堆叠测试系统的系统组件式 SMU 使用。
它在同类电流-电压测量中提供可扩展性与最高测量精度。
它可通过支持强大测量能力的 FLEX 命令集进行远程控制。
如需了解有关电流-电压分析仪的更多信息,请访问精密电流-电压分析仪页面
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是德科技 | KEYSIGHT
E5270B 分析仪 Upto8 详细指标
IV measurement systems for device characterization
一、E5270B Mainframe Specifications
Supported plug-In modules
The E5270B supports eight slots for plug-in modules.
– Ambient temperature change less than
± 1°C after auto calibration execution
– Measurement made within one hour after auto calibration execution
– 平均 (高-速度 per-SMU
ADC)
128 samples in 1 PLC
Integration time (high-resolution central ADC): 1 PLC (1 nA to 1A range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
– Kelvin connection
– Calibration period
1 year
最大值输出功率
条件:Note: Using the HPSMU, MPSMU, and Atto Level HRSMU units, it is impossible to create a combination that exceeds the 80 watt limit.
The total module power consumption cannot exceed
80 W.
最大值电压 between 通用和地
≤
± 42 V
脉冲测量
Pulse width
500 µsec to 2 s
Pulse period
5 ms to 5 s
Period ≥ width +
2 ms
(when width ≤
100 ms)
Period ≥ width +
10 ms
(when width >
100 ms)
Pulse resolution
100 µs
二、地单位 (GNDU) 规格
适用型号 E5270B mainframe
Output voltage: 0 V
± 100 µV
Maximum sink current
4 A
GNDU 补充信息
Load capacitance
1 µF
Cable resistance
For IS ≤
1.6 A:
Force line R <
1 Ω
For 1.6 A < IS ≤
2.0 A:
Force line R <
0.7 Ω
For 2.0 A < IS ≤
4.0 A:
Force line R <
0.35 Ω
For all cases
Sense line R ≤
10 Ω
Where IS is the current being sunk by the GNDU
Note: This document lists specifica - tions and supplemental information for the E5270B and its associated modules. The specifications are the
standards against which the E5270B
and its associated modules are tested. When the E5270B or any of its associated modules are shipped from the factory, they meet the specifica -
tions. The “supplemental” information and “typical” entries in the following specifications are not warranted, but provide useful information about the
功能和性能 instrument
条件:1. This is connected with the E5287A Atto Level HRSMU
Part number Description Slots occupied Range of operation Measure resolution
E5280B HPSMU 2 -200 V to 200 V, -1 A to 1 A 2 µV
10 fA
E5281B MPSMU 1 -100 V to 100 V, -100 mA to 100 mA 0.5 µV
10 fA
E5287A Atto Level HRSMU 1 -100 V to 100 V, -100 mA to 100 mA 0.5 µV
1 fA
E5288A1 Atto Sense and Switch Unit (ASU) – -100 V to 100 V, -100 mA to 100 mA 0.5 µV
0.1 fA
04 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
三、MPSMU (Medium 功率 SMU) 模块规格
电压范围, 分辨率, 和精度 (MPSMU)
Measure resolution Measure accuracy
1
条件:1. ± (% of output/measured value + offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), Vo is the output voltage in volts.
3. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
Force accuracy
1 High speed ADC High resolution ADC Maximum
current ±0.5 V 25 µV 25 µV 0.5 µV ±(0.03 % + 350 µV) ±(0.03 % + 250 µV) ±(0.02 % + 250 µV) 100 mA ±2 V 100 µV 100 µV 2 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) ±(0.02 % + 700 µV) 100 mA ±5 V 250 µV 250 µV 5 µV ±(0.03 % + 2 mV) ±(0.03 % + 2 mV) ±(0.02 % + 1 mV)
100 mA
±20 V 1 mV 1 mV 20 µV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) ±(0.02 % + 2 mV)
100 mA
±40 V 2 mV 2 mV 40 µV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) ±(0.02 % + 3 mV)
2
±100 V 5 mV 5 mV 100 µV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV) ±(0.03 % + 5 mV)
3
电流范围, 分辨率, 和精度 (MPSMU)
Measure resolution
4
条件:4. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is
multiplied by Vo) 5. Measurement accuracy when using either the high-speed ADC or the high-resolution ADC 6. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps. 7. Specified measurement resolution is limited by fundamental noise limits.
Force accuracy 1 Measure accuracy
1,2 Maximum
voltage ±1 nA 50 fA 50 fA 10 fA ±(0.5 %+3 pA+2 fA x Vo) ±(0.5 %+3 pA+2 fA x Vo) 100 V ±10 nA 500 fA 500 fA 10 fA ±(0.5 %+7 pA+20 fA x Vo) ±(0.5 %+5 pA+20 fA x Vo) 100 V ±100 nA 5 pA 5 pA 100 fA ±(0.12 %+50 pA+200 fA x Vo) ±(0.1 %+30 pA+200 fA x Vo)
100 V
±1 µA 50 pA 50 pA 1 pA ±(0.12 %+400 pA+2 pA x Vo) ±(0.1 %+200 pA+2 pA x Vo)
100 V
±10 µA 500 pA 500 pA 10 pA ±(0.12 %+5 nA+20 pA x Vo) ±(0.1 %+3 nA+20 pA x Vo)
100 V
±100 µA 5 nA 5 nA 100 pA ±(0.12 %+40 nA+200 pA x Vo) ±(0.1 %+20 nA+200 pA x Vo)
100 V
±1 mA 50 nA 50 nA 1 nA ±(0.12 %+500 nA+2 nA x Vo) ±(0.1 %+300 nA+2 nA x Vo)
100 V
±10 mA 500 nA 500 nA 10 nA ±(0.12 %+4 µA+20 nA x Vo) ±(0.1 %+2 µA+20 nA x Vo)
100 V
±100 mA 5 µA 5 µA 100 nA ±(0.12 %+50 µA+200 nA x Vo) ±(0.1 %+30 µA+200 nA x Vo)
3
电压源模式
Voltage range Power 0.5 V 20 x Ic (W) 2 V 20 x Ic (W) 5 V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
电压 compliance 功率
Vc ≤ 20
20 x Io (W)
20 &lt; Vc ≤ 40
40 x Io (W)
40 &lt; Vc ≤ 100
100 x Io (W)
Where Vc is the voltage compliance setting and Io is output current.
-20
-50
-100
-100 -40 -20 20 40
100
Current (mA)
Voltage (V)
05 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Voltage/current compliance (limiting)
条件:The SMU can limit output voltage or current to prevent damaging the device under test.
Voltage
0 V to ±100 V
Current
±1 pA to ±100 mA
Compliance accuracy: Same as the current (or voltage) set accuracy.
Maximum allowable cable resistance (Kelvin connection)
Force line
10 Ω
Sense line
10 Ω
Voltage source output resistance
0.3 Ω typical (Force line, non-Kelvin connection)
电压测量输入电阻
≥ 1013 Ω
电流源输出电阻
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity)
For 1 nA to 10 nA ranges:
I setting accuracy
± 12 % of range
For 100 nA to 100 mA ranges:
I setting accuracy
± 2.5 % of range
Maximum capacitive load
For 1 nA to 10 nA ranges
1000 pF
For 100 nA to 10 mA ranges
10 nF
For 100 mA ranges
100 µF
Maximum guard capacitance
900 pF
Maximum shield capacitance
5000 pF
Maximum guard offset voltage
± 3 mV
四、噪声规格
(典型值, 滤波器 ON)
Voltage source
0.01 % of V range (rms)
Current source
0.1 % of I
过冲 (典型值, 滤波器 ON)
Voltage source
0.03 % of V range
Current source
1 % of I range
范围 switching transient 噪声 (典型值, 滤波器 ON)
Voltage ranging
250 mV
Current ranging
10 mV
Slew rate
0.2 V/µs
SMU 脉冲设置精度 (fixed 测量范围)
Width: 0.5 % +
50 µs
Period: 0.5 % +
100 µs
五、HPSMU (高功率 SMU) 模块规格
电压范围, 分辨率, 和精度 (HPSMU)
Measure resolution Measure accuracy
1
Force accuracy
1 High speed ADC High resolution
条件:1. ± (% of output/measured value + offset voltage V)
2. 1 A (Vo ≤20 V), 500 mA (20 V <Vo ≤40 V), Vo is the output voltage in volts.
3. 1 A (Vo ≤20 V), 500 mA (20 V <Vo ≤40 V), 125 mA (40 V <Vo ≤100 V), Vo is the output voltage in volts.
4. 1 A (Vo ≤20 V), 500 mA (20 V <Vo ≤40 V), 125 mA (40 V <Vo ≤100 V), 50 mA (100 V <Vo ≤200 V), Vo is the output voltage in volts.
Maximum current ±2 V 100 µV 100 µV 2 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) ±(0.02 % + 700 µV) 1 A ±20 V 1 mV 1 mV 20 µV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) ±(0.02 % + 2 mV)
1 A
±40 V 2 mV 2 mV 40 µV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) ±(0.02 % + 3 mV)
2
±100 V 5 mV 5 mV 100 µV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV) ±(0.03 % + 5 mV)
3
±200 V 10 mV 10 mV 200 µV ±(0.045 % + 30 mV) ±(0.035 % + 40 mV) ±(0.035 % + 10 mV)
4
电流范围, 分辨率, 和精度 (HPSMU)
Measure resolution
5
条件:5. (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied
by Vo) resolution (< pulse width) 6. Measurement accuracy when using either the high-speed ADC or the high-resolution ADC 7. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 100 mA) 8. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in amps.
9. Specified measurement resolution is limited by fundamental noise limits
Force accuracy 1 Measure accuracy
1,2 Maximum
voltage ±1 nA 50 fA 50 fA 10 fA ±(0.5 %+3 pA+2 fA x Vo) ±(0.5 %+3 pA+2 fA x Vo) 200 V ±10 nA 500 fA 500 fA 10 fA ±(0.5 %+7 pA+20 fA x Vo) ±(0.5 %+5 pA+20 fA x Vo) 200 V ±100 nA 5 pA 5 pA 100 fA ±(0.12 %+50 pA+200 fA x Vo) ±(0.1 %+30 pA+200 fA x Vo)
200 V
±1 µA 50 pA 50 pA 1 pA ±(0.12 %+400 pA+2 pA x Vo) ±(0.1 %+200 pA+2 pA x Vo)
200 V
±10 µA 500 pA 500 pA 10 pA ±(0.12 %+5 nA+20 pA x Vo) ±(0.1 %+3 nA+20 pA x Vo)
200 V
±100 µA 5 nA 5 nA 100 pA ±(0.12 %+40 nA+200 pA x Vo) ±(0.1 %+20 nA+200 pA x Vo)
200 V
±1 mA 50 nA 50 nA 1 nA ±(0.12 %+500 nA+2 nA x Vo) ±(0.1 %+300 nA+2 nA x Vo)
200 V
±10 mA 500 nA 500 nA 10 nA ±(0.12 %+4 µA+20 nA x Vo) ±(0.1 %+2 µA+20 nA x Vo)
200 V
±100 mA 5 µA 5 µA 100 nA ±(0.12 %+50 µA+200 nA x Vo) ±(0.1 %+30 µA+200 nA x Vo)
3
±1 A 50 µA 50 µA 1 µA ±(0.5 %+500 µA+2 µA x Vo) ±(0.5 %+300 µA+2 µA x Vo)
4
06 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Voltage/current compliance(limiting)
条件:The SMU can limit output voltage or current to prevent damaging the device under test.
Voltage: 0 V to
± 200 V
Current: ± 1 pA to
± 1 A
Compliance accuracy: Same as the current (or voltage) set accuracy.
Maximum allowable cable resistance (Kelvin connection)
Force line: 10 Ω (I ≤
100 mA)
Force line: 1.5 Ω (100 mA &lt; I ≤
1 A)
Sense line
10 Ω (All cases)
Voltage source output resistance
0.2 Ω typical (Force line, non-Kelvin connection)
电压源模式
Voltage range Power 2 V 20 x Ic (W) 20 V 20 x Ic (W) 40 V
40 x Ic (W)
100 V
100 x Ic (W)
200 V
200 x Ic (W)
电压 compliance 功率
Vc ≤ 20
20 x Io (W)
20 &lt; Vc ≤ 40
40 x Io (W)
40 &lt; Vc ≤ 100
100 x Io (W)
100 &lt; Vc ≤ 200
200 x Io (W)
Where Vc is the voltage compliance setting and Io is output current.
HPSMU 测量和输出范围电阻
≥ 1013 Ω
电流源输出电阻
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity)
For 1 nA to 10 nA ranges:
I setting accuracy
± 12 % of range
For 100 nA to 1 A ranges:
I setting accuracy
± 2.5 % of range
Maximum capacitive load
For 1 nA to 10 nA ranges
1000 pF
For 100 nA to 10 mA ranges
10 nF
For 100 mA to 1 A ranges
100 µF
Maximum guard capacitance
900 pF
Maximum shield capacitance
5000 pF
Maximum guard offset voltage
± 1 mV
噪声特性 (典型值, 滤波器 ON)
Voltage source
0.01 % of V
range (rms)
Current source
0.1 % of I
过冲 (典型值, 滤波器 ON)
Voltage source
0.03 % of V range
Current source
1 % of I range
范围 switching transient 噪声 (典型值, 滤波器 ON)
Voltage ranging
250 mV
Current ranging
10 mV
Slew rate
0.2 V/µs
SMU 脉冲设置精度 (fixed 测量范围)
Width: 0.5 % +
50 µs
Period: 0.5 % +
100 µs
Trigger out delay (pulsed measurements)
0 to 32.7 ms with 100 µs resolution (&lt; pulse width)
07 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
1000
-50
-125
-500
-1000
-200 -100 -40 -20 20 40 100
200
Atto 电平 HRSMU 模块规格 ((不含) ASU)
Voltage range, resolution, and accuracy (Atto level HRSMU without ASU)
Measure resolution Measure accuracy
1
条件:1. ± (% of output/measured value + offset voltage)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V <Vo ≤ 40 V), Vo is the output voltage in volts.
3. 100 mA (Vo ≤ 20 V), 50 mA (20 V <Vo ≤ 40 V), 20 mA (40 V <Vo ≤ 100 V), Vo is the output voltage in volts.
Force accuracy
1 High speed ADC High resolution ADC Maximum
current ±0.5 V 25 µV 25 µV 0.5 µV ±(0.02 % + 150 µV) ±(0.01 % + 250 µV) ±(0.01 % + 150 µV) 100 mA ±2 V 100 µV 100 µV 2 µV ±(0.02 % + 400 µV) ±(0.01 % + 700 µV) ±(0.01 % + 200 µV) 100 mA ±5 V 250 µV 250 µV 5 µV ±(0.02 % + 750 µV) ±(0.01 % + 2 mV) ±(0.01 % + 250 µV)
100 mA
±20 V 1 mV 1 mV 20 µV ±(0.02 % + 3 mV) ±(0.01 % + 4 mV) ±(0.01 % + 1 mV)
100 mA
±40 V 2 mV 2 mV 40 µV ±(0.025 % + 6 mV) ±(0.015 % + 8 mV) ±(0.015 % + 2 mV)
2
±100 V 5 mV 5 mV 100 µV ±(0.03 % + 15 mV) ±(0.02% + 20 mV) ±(0.02 % + 5 mV)
3
Current range, resolution, and accuracy (Atto level HRSMU without ASU)
Measure resolution
4,5
条件:4. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is
multiplied by Vo) 5. Measurement accuracy when using either the high-speed ADC or the high-resolution ADC. 6. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps. 7. Minimum 10 aA display resolution at 10 pA range by 6 digits.
8. Specified measurement resolution is limited by fundamental noise limits.
Force accuracy 1 Measure accuracy
1,2 Maximum
voltage ±10 pA 5 fA 1 fA 1 fA ±(0.5 %+40 fA+10 aA x Vo) ±(0.5 %+15 fA+10 aA x Vo) 100 V ±100 pA 5 fA 5 fA 2 fA ±(0.5 %+120 fA+100 aA x Vo) ±(0.5 %+40 fA+100 aA x Vo) 100 V ±1 nA 50 fA 50 fA 10 fA ±(0.25 %+400 fA+1 fA x Vo) ±(0.25 %+300 fA+1 fA x Vo)
100 V
±10 nA 500 fA 500 fA 10 fA ±(0.25 %+4 pA+10 fA x Vo) ±(0.25 %+2 pA+10 fA x Vo)
100 V
±100 nA 5 pA 5 pA 100 fA ±(0.12 %+40 pA+100 fA x Vo) ±(0.1 %+20 pA+100 fA x Vo)
100 V
±1 µA 50 pA 50 pA 1 pA ±(0.12 %+400 pA+1 pA x Vo) ±(0.1 %+200 pA+1 pA x Vo)
100 V
±10 µA 500 pA 500 pA 10 pA ±(0.07 %+4 nA+10 pA x Vo) ±(0.05 %+2 nA+10 pA x Vo)
100 V
±100 µA 5 nA 5 nA 100 pA ±(0.07 %+40 nA+100 pA x Vo) ±(0.05 %+20 nA+100 pA x Vo)
100 V
±1 mA 50 nA 50 nA 1 nA ±(0.06 %+400 nA+1 nA x Vo) ±(0.04 %+200 nA+1 nA x Vo)
100 V
±10 mA 500 nA 500 nA 10 nA ±(0.06 %+4 µA+10 nA x Vo) ±(0.04 %+2 µA+10 nA x Vo)
100 V
±100 mA 5 µA 5 µA 100 nA ±(0.12 %+40 µA+100 nA x Vo) ±(0.1 %+20 µA+100 nA x Vo)
3
电压源模式
Voltage range Power 0.5 V 20 x Ic (W) 2 V 20 x Ic (W) 5 V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
电压 compliance 功率
Vc ≤ 20
20 x Io (W)
20 &lt; Vc ≤ 40
40 x Io (W)
40 &lt; Vc ≤ 100
100 x Io (W)
Where Vc is the voltage compliance setting and Io is output current.
Atto 电平 HRSMU(不含) ASU 测量和输出范围
-20
-50
-100
-100 -40 -20 20 40
100
Current (mA)
Voltage (V)
08 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Voltage/current compliance(limiting)
条件:The SMU can limit output voltage or current to prevent damaging the device under test.
Voltage: 0 V to
± 100 V
Current: ± 100 fA to
± 100 mA
Compliance accuracy: Same as the current (or voltage) set accuracy.
Maximum allowable cable resistance (Kelvin connection)
Force line
10 Ω
Sense line
10 Ω
Voltage source output resistance
0.3 Ω typical (Force line, non-Kelvin connection)
电压测量输入电阻
≥ 1013 Ω
电流源输出电阻
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity)
For 10 pA to 10 nA ranges:
I setting accuracy
± 12 % of range
For 100 nA to 100 mA ranges:
I setting accuracy
± 2.5 % of range
Maximum capacitive load
For 10 pA to 10 nA ranges
1000 pF
For 100 nA to 10 mA ranges
10 nF
For 100 mA ranges
100 µF
Maximum guard capacitance
900 pF
Maximum shield capacitance
5000 pF
Maximum guard offset voltage
± 3 mV
噪声特性 (典型值, 滤波器 ON)
Voltage source
0.01 % of V
range (rms)
Current source
0.1 % of I range (rms)
过冲 (典型值, 滤波器 ON)
Voltage source
0.03 % of V range
Current source
1 % of I range
范围 switching transient 噪声 (典型值, 滤波器 ON)
Voltage ranging
250 mV
Current ranging
10 mV
Slew rate
0.2 V/µs
SMU 脉冲设置精度 (fixed 测量范围)
Width: 0.5 % +
50 µs
Period: 0.5 % +
100 µs
Trigger out delay (pulsed measurements)
0 to 32.7 ms with 100 µs resolution (&lt; pulse width)
Atto 电平 HRSMU 模块规格 ((含) ASU)
Voltage range, resolution, and accuracy (Atto level HRSMU with ASU)
Measure resolution Measure accuracy
1
条件:1. ± (% of output/measured value + offset voltage)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V <Vo ≤ 40 V), Vo is the output voltage in volts.
3. 100 mA (Vo ≤ 20 V), 50 mA (20 V <Vo ≤ 40 V), 20 mA (40 V <Vo ≤ 100 V), Vo is the output voltage in volts.
Force accuracy
1 High speed ADC High resolution ADC Maximum
current ±0.5 V 25 µV 25 µV 0.5 µV ±(0.02 % + 150 µV) ±(0.01 % + 250 µV) ±(0.01 % + 150 µV) 100 mA ±2 V 100 µV 100 µV 2 µV ±(0.02 % + 400 µV) ±(0.01 % + 700 µV) ±(0.01 % + 200 µV) 100 mA ±5 V 250 µV 250 µV 5 µV ±(0.02 % + 750 µV) ±(0.01 % + 2 mV) ±(0.01 % + 250 µV)
100 mA
±20 V 1 mV 1 mV 20 µV ±(0.02 % + 3 mV) ±(0.01 % + 4 mV) ±(0.01 % + 1 mV)
100 mA
±40 V 2 mV 2 mV 40 µV ±(0.025 % + 6 mV) ±(0.015 % + 8 mV) ±(0.015 % + 2 mV)
2
±100 V 5 mV 5 mV 100 µV ±(0.03 % + 15 mV) ±(0.02% + 20 mV) ±(0.02 % + 5 mV)
3
09 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Current range, resolution, and accuracy (Atto level HRSMU with ASU)
Measure resolution
4,5
条件:1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is
multiplied by Vo) 2. Measurement accuracy when using either the high-speed ADC or the high-resolution ADC. 3. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps 4. Minimum 1 aA display resolution at 1 pA range by 6 digits.
5. Specified measurement resolution is limited by fundamental noise limits.
6. Measurements at lower range are affected strongly by vibrations and shocks. Do not place the environment of vibrations and shocks
Measure accuracy
1,2 Maximum
voltage ±1 pA 1 fA 100 aA 100 aA ±(1.8 %+15 fA) ±(1.8 %+12 fA) 100 V ±10 pA 5 fA 1 fA 400 aA ±(0.5 %+40 fA+10 aA x Vo) ±(0.5 %+15 fA+10 aA x Vo) 100 V ±100 pA 5 fA 5 fA 500 aA ±(0.5 %+120 fA+100 aA x Vo) ±(0.5 %+40 fA+100 aA x Vo)
100 V
±1 nA 50 fA 50 fA 10 fA ±(0.25 %+400 fA+1 fA x Vo) ±(0.25 %+300 fA+1 fA x Vo)
100 V
±10 nA 500 fA 500 fA 10 fA ±(0.25 %+4 pA+10 fA x Vo) ±(0.25 %+2 pA+10 fA x Vo)
100 V
±100 nA 5 pA 5 pA 100 fA ±(0.12 %+40 pA+100 fA x Vo) ±(0.1 %+20 pA+100 fA x Vo)
100 V
±1 µA 50 pA 50 pA 1 pA ±(0.12 %+400 pA+1 pA x Vo) ±(0.1 %+200 pA+1 pA x Vo)
100 V
±10 µA 500 pA 500 pA 10 pA ±(0.07 %+4 nA+10 pA x Vo) ±(0.05 %+2 nA+10 pA x Vo)
100 V
±100 µA 5 nA 5 nA 100 pA ±(0.07 %+40 nA+100 pA x Vo) ±(0.05 %+20 nA+100 pA x Vo)
100 V
±1 mA 50 nA 50 nA 1 nA ±(0.06 %+400 nA+1 nA x Vo) ±(0.04 %+200 nA+1 nA x Vo)
100 V
±10 mA 500 nA 500 nA 10 nA ±(0.06 %+4 µA+10 nA x Vo) ±(0.04 %+2 µA+10 nA x Vo)
100 V
±100 mA 5 µA 5 µA 100 nA ±(0.12 %+40 µA+100 nA x Vo) ±(0.1 %+20 µA+100 nA x Vo)
3
电压源模式
Voltage range Power 0.5 V 20 x Ic (W) 2 V 20 x Ic (W) 5 V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
电压 compliance 功率
Vc ≤ 20
20 x Io (W)
20 &lt; Vc ≤ 40
40 x Io (W)
40 &lt; Vc ≤ 100
100 x Io (W)
Where Vc is the voltage compliance setting and Io is output current. Atto level HRSMU with ASU measurement and output range
-20
-50
-100
-100 -40 -20 20 40
100
Current (mA)
Voltage (V)
10 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Voltage/current compliance(limiting)
条件:The SMU can limit output voltage or current to prevent damaging the device under test.
Voltage: 0 V to
± 100 V
Current: ± 10 fA to
± 100 mA
Compliance accuracy: Same as the current (or voltage) set accuracy.
Maximum allowable cable resistance (Kelvin connection)
Force line
10 Ω
Sense line
10 Ω
Voltage source output resistance
0.3 Ω typical (Force line, non-Kelvin connection)
电压测量输入电阻
≥ 1013 Ω
电流源输出电阻
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy (for opposite polarity)
For 1 pA to 10 nA ranges:
I setting accuracy
± 12 % of range
For 100 nA to 100 mA ranges:
I setting accuracy
± 2.5 % of range
Maximum capacitive load
For 1 pA to 10 nA ranges
1000 pF
For 100 nA to 10 mA ranges
10 nF
For 100 mA ranges
100 µF
Maximum guard capacitance
660 pF
Maximum shield capacitance
3500 pF
Maximum guard offset voltage: ± 4.2 mV (Iout ≤
100 µA)
噪声特性 (典型值, 滤波器 ON)
Voltage source
0.01 % of V
range (rms)
Current source
0.1 % of I
过冲 (典型值, 滤波器 ON)
Voltage source
0.03 % of V range
Current source
1 % of I range
范围 switching transient 噪声 (典型值, 滤波器 ON)
Voltage ranging
250 mV
Current ranging
10 mV
Slew rate
0.2 V/µs
SMU 脉冲设置精度 (fixed 测量范围)
Width: 0.5 % +
50 µs
Period: 0.5 % +
100 µs
Trigger out delay (pulsed measurements)
0 to 32.7 ms with 100 µs resolution (&lt; pulse width)
六、AUX 通路规格
Maximum voltage 100 V: between AUX input and AUX common 100 V: between AUX input and circuit common
42 V: between AUX common and circuit common
Maximum current
0.5 A: between AUX input and force output
ASU 补充信息
Band width (at –3 dB): &lt;
30 MHz (AUX port)
11 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Staircase 扫描测量模式
条件:with the primary sweep channel as an additional voltage or current sweep source. Linear or log sweeps can be performed.
Outputs swept voltage or current, and measures dc voltage or current.
One channel can sweep current or voltage while up to eight channels can measure current or voltage. A second channel can be synchronized
Number of steps
1 – 1,001
Hold time
0 – 655.35 s
1 ms resolution
Delay time
0 – 65.5350 s
100 µs resolution
Multi-通道扫描测量模式
Outputs swept voltage or current, and measures dc voltage or current.
Up to eight channels can sweep cur- rent or voltage and up to eight chan - nels can measure current or voltage. Linear or log sweeps
can be performed
Number of steps: 1–
1,001
Hold time
0 – 655.35 s
1 ms resolution
Delay time
0 – 65.5350 s
100 µs resolution
脉冲 spot 测量模式
Outputs a voltage or current pulse and measures dc voltage or current.
Pulse width
500 µs to 100 ms
100 µs resolution
Pulse period
5 ms to 1 s (≥ pulse
width + 4 ms)
100 µs resolution
Maximum pulse duty
50 %
脉冲扫描测量模式
Outputs pulsed swept voltage or current, and measures dc voltage or current. A second channel can be programmed to output a staircase
sweep voltage or current synchro - nized with the pulsed sweep output.
Staircase 扫描(含) 脉冲 bias 测量模式
Outputs swept voltage or current, and measures dc voltage or current.
A second channel can be programmed to output a pulsed bias voltage or current. A third channel can be synchronized with the primary sweep
Quasi-脉冲 spot 测量模式
Outputs quasi-pulsed voltage and measures dc voltage or current.
Linear search 测量模式
Outputs and measure voltage or current by using linear search method.
Binary search 测量模式
Outputs and measure voltage or current by using binary search method.
Time Stamp
The E5270B supports a time stamp
功能 utilizing 内部 quartz 时钟
Resolution
100 µs
Program Memory
条件:municate over the GPIB interface. In addition, input data can be passed to code sequences stored in program memory.
The E5270B mainframe contains
(volatile) memory that can be used to increase test measurement throughput. Program memory allows the storage of program code in the
E5270B, eliminating the need to com -
Maximum lines of storable code
40,000
Maximum number of program sequences
2,000
最小值编号 storable data
Points
34,034
12 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Trigger I/O
Trigger in/out synchronization pulses before and after setting and measur- ing dc voltage and current. Arbitrary trigger events can be masked or
– Start a measurement
– Start a measurement at each sweep step for a staircase sweep or multi channel sweep measurement
– Start the source output at each sweep step for a staircase sweep, pulsed sweep, staircase sweep with pulsed bias, or multi-channel
– Recover from a wait state
– Input level: TTL level, negative or positive edge trigger, or
– The end of a measurement is reached
条件:– The end of a measurement at each sweep step for a staircase sweep or multi channel sweep measurement is reached.
– Completion of the source output setup at each sweep step for a staircase sweep, pulsed sweep, staircase sweep with pulsed bias,
或 multi-通道扫描测量
– Completion of the pulsed output setup for a pulsed spot measurement.
General Purpose
条件:an alternative to the BNC trigger-in and trigger-out lines to synchronize the E5270B with other instruments.
They can also be used as output and input ports for digital signals. The user can selectively assign pins to trigger mode or digital I/O mode.
Digital I/O 16 general-purpose digital I/O signals are available via a
25-pin DIN connector. These pins can be used as
七、通用规格
温度范围
Operating
+5°C to +40°C
Storage
–20°C to +60°C
湿度范围
Operating
15 % to 70 % RH
Storage
5 % to 80 % RH
Operating
0 m to 2,000 m (6,561 ft)
Storage
0 m to 4,600 m (15,092 ft)
Power requirement
AC voltage
90 V to 264 V
Line frequency
47 Hz to 63 Hz
最大值 volt-amps (VA)
E5270B
600 VA
适用型号 EMC: IEC61326-1/EN61326-1
AS/NZS CISPR
11
KC: RRA Notification amending
Radio Waves Act Article
58-2
适用型号安全: IEC61010-1/EN61010-1
CAN/CSA-C22.2
No.
61010-1-12, C/US
E5270B: 426 mm W x 235 mm H x
575
E5270B mainframe only
17 kg
E5280A HPSMU
2.5 kg
E5281A MPSMU
1.4 kg
E5287A HRSMU
1.5 kg
E5288A ASU
0.5 kg
Furnished Accessories
– USB-GPIB interface (Keysight
82357B)
– GNDU to Kelvin adaptor (Keysight N1254A-100)
– Interlock cable
– CD-ROMs (EasyEXPERT install media, VXI plug&amp;play driver and TIS library)
– TIS library
Supported OS: Windows
7
Professional (SP1
32 bit
or 64 bit)
13 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
14 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Keysight EasyEXPERT group+ Software
条件:allows you the option of storing test condition and measurement data automatically
able information is not lost and that measurements can be repeated at a later date.
environment that facilitate the development of complex testing algorithms.
Keysight EasyEXPERT group+ GUI based characterization software is available on
your PC to accelerate the characterization tasks. It supports efficient and repeatable
device characterization in the entire characterization process from measurement
setup and execution to analysis and data management either by interactive manual
operation or automation across a wafer in conjunction with a semiautomatic wafer
prober. EasyEXPERT group+ makes it easy to perform complex device characterization
immediately with the ready-to-use measurements (application tests) furnished, and
after each measurement in a unique built-in database (workspace), ensuring that valu -
Finally, EasyEXPERT has built-in analysis capabilities and a graphical programming
Key features
– Multiple measurement modes for quick setup and measurement execution
(application 测试, classic 测试, 和 quick 测试)
– Graphical display, automated analysis capabilities and data generation to
Excel and image for analysis and reporting
– Built-in database (workspace) records test data automatically and simplifies
the data management without numerous data files
– GUI-based control of the Keysight B2200A, B2201A and E5250A
switching matrices
– EasyEXPERT remote control function supports the remote measurement
execution of application tests that are created on GUI interactively, via the
LAN interface
– Data back capability and various data protection feature for shared usage
by multiple users
– Characterization environment is available on user’s PC as a personal and
portable analyzer environment. EasyEXPERT group+ can be installed on any
Application library
EasyEXPERT group+ comes with the application tests conveniently organized by device
type, application, and technology. You can easily edit and customize the furnished ap -
plication tests to fit your specific needs. Application tests are provided for the following
CMOS Transistor Id-Vg, Id-Vd, Vth, breakdown, etc
Bipolar Transistor Ic-Vc, diode, Gummel plot, breakdown, hfe, etc.
Nano Device Resistance, Id-Vg, Id-Vd, Ic-Vc, etc
条件:Reliability test NBTI/PBTI, electro migration, hot carrier injection, J-Ramp, TDDB, etc.
15 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
Application 测试模式
The application test mode provides application oriented point-
and-click test setup and execution. An application test can be se -
lected from the library by device type and desired measurement,
and then executed after modifying the default input parameters
as needed. Available application tests can be adapted to config -
Tracer 测试模式
The tracer test mode offers intuitive and interactive sweep control
using a rotary knob similar to a curve tracer. Just like an analog
curve tracer, you can sweep in only one direction (useful for R&amp;D
device analysis) or in both directions (useful in failure analysis
applications). Test set ups created in tracer test mode can be
seamlessly and instantaneously transferred to classic test mode
Quick 测试模式
A GUI-based Quick Test mode enables you to perform test se - quencing without programming. You can select, copy, rearrange and cut-and-paste any application tests with a few simple mouse clicks. Once you have selected and arranged your tests, simply
click on the measurement button to begin running an automated
八、Other 测量规格
SMU 设置能力
Limited auto ranging, voltage/current compliance, power compliance, automatic sweep abort functions, self-test, and self-calibration
Standby mode
SMUs in “Standby” remain programmed to their specified output
value even as other units are reset for the next measurement.
Bias hold function
条件:measurement. The function ceases as soon as these conditions end or when a measurement that does not use this function is started.
This function allows you to keep a source active between measurements. The source module will apply the specified bias between measurements when running classic tests inside an application test, in quick test mode, or during a repeated
电流偏置 cancel
This function subtracts the offset current from the current measurement raw data, and returns the result as the measure - ment data. This function is used to compensate the error factor (offset current) caused by the measurement path such as the
X-Y graph plot
X-axis and up to eight Y-axes, linear and log scale, real time
刻度: Auto 刻度和 zoom
Marker: Marker to min/max, interpolation, direct marker, and marker skip
Cursor: Direct cursor
Line: Two lines, normal mode, grad mode, tangent mode, and regression mode
List display
Measurement data and calculated user function data are listed
in conjunction with sweep step number or time domain sampling
step number. Up to 20 data sets can be displayed.
Data variable display
Up to 20 user-defined parameters can be displayed on the
Automatic analysis function
On a graphics plot, the markers and lines can be automatically
located using the auto analysis setup. Parameters can be auto -
matically determined using automatic analysis, user function, and
Analysis functions
Up to 20 user-defined analysis functions can be defined using
arithmetic expressions
Measured data, pre-defined variables, and read out functions can
Read out functions
The read out functions are built-in functions for reading various
Data export
条件:X-Y graph plot can be printed or stored as image data to clipboard or mass storage device. (File type: bmp, gif, png, emf).
Graph and list data can be exported to Excel.
16 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
User functions
Up to 20 user-defined functions can be defined using
Arithmetic operators
条件:base e), mavg (moving average), max,min, sqrt, trigonometric function, inverse trigonometric function, and so on.
+, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging),
cond (conditional evaluation), delta, diff (differential), exp (expo -
nent), integ (integration), lgt (logarithm, base
10), log (logarithm
Physical constants
Keyboard constants are stored in memory as follows: q: Electron charge, 1.602177E-19 C k: Boltzman’s constant
1.380658E-23 ε (e): Dielectric constant of vacuum
8.854188E-12
Engineering units
The following unit symbols are also available on the keyboard:
a (10-18), f (10-15), p (10-12), n (10-9),
u or μ (10-6), m (10-3), k (103), M (106),
G (109), T (1012) , P (1015)
EasyEXPERT group+ supports the built-in database called
条件:“workspace”. Workspaces are created on a HDD, and they enable to manage and access all the measurement related data without handling numerous files. Every workspace supports the following features:
– Access to measurement capabilities and data stored in the workspace.
– Save/Import/Export measurement settings and data (application library, measurement settings, my favorite setup, and measurement data)
– Recall the setup for measurement reproduction and data for analysis
Precision 电流 - 电压分析仪 Series
Discontinued Advanced Device Analyzer Precision IV Analyzer Economic IV
适用型号 B2900A Series
SMU 4155B/C
4156B/C
Classic Test
I/V Sweep Yes Yes Yes Yes Yes Yes1
GUI based switching matrix control
Yes2 - Yes2 Yes2 Yes2 Yes2
Quick 测试是是是是是是
Oscilloscope view Yes3 Yes3 - - - -
External instrument driver support
LCR meter (4284A/E4980A)
是是是是是是
Pulse Generator (81110A) Yes Yes Yes Yes Yes Yes
DVM (3458A) Yes Yes Yes Yes Yes Yes
Prober control in Quick Test mode Yes4 Yes4 Yes4 Yes4 Yes4 Yes4
Firmware requirement A.04.00 or
later5
A.04.00 or
later5
B.01.10 or
条件:later 1. PGU and VSU/VMU are supported. Differential voltage measurement of VMU is not supported. 2. B2200/01A and E5250A (with E5252A cards) are supported 3. Only available for supported modules.
4. Cascade Microtech Sumit 12000/S300 (Nucleus), Cascade Microtech (Suss MicroTec) PA200/PA300, and Vector Semiconductor VX-2000/VX-3000
5. The latest firmware version is strongly recommended to take full advantage of measurement capabilities.
B.01.10 or
later 1.0 or later HOSTC
03.08 or later
SMUC
04.08 or
17 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
EasyEXPERT group+ supported instruments and prerequisites
Supported instruments and features
18 | Keysight | Precision IV Analyzer/8 Slot Precision Measurement Mainframe - Data Sheet
以上指标摘自厂家官方数据手册,完整定义、测试条件与保证值口径以手册为准。完整指标、测试条件与定义口径请见产品页「软件和手册 | 白皮书」栏目中的官方数据手册。
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是德科技香港有限公司 中国香港北角电气道169号25楼

电话:(852) 31977777

传真:(852) 25069292 香港热线 800-938-693


• 维修 / 校准服务中心

中国大陆 北京 / 成都 / 苏州 服务热线 800-810-0189 / 400-810-0189


授权分销商


• 上海信果电子科技有限公司(上海)

上海市沪闵路8075号虹梅商务大厦6楼609室

邮编:200233

电话:021-64518399

传真:021-54560890

邮箱:jason.wu@signalgroup.com.tw

官网:www.signalgroup.com.cn


• 上海精测电子有限公司(上海)

上海市北京东路668号西楼15E

邮编:200001

电话:13916371522

传真:021-53086102

邮箱:yangzhen@jingce.com

官网:www.jingce.com


• 北京东方中科集成科技股份有限公司(北京)

北京市海淀区复兴路69号院12号楼2层、7层 邮政编码:100039

邮编:100039

电话:400-650-5566

传真:010-68728001

邮箱:zhangzp@oimec.com.cn

官网:www.dfzk.com/br_keysight.html


• 北京千聚科技发展有限公司(北京)

北京市海淀区西三旗花园雪梨澳乡A区23-4号

邮编:100085

电话:010-82907162

邮箱:zhuqihui@qianjukeji.com.cn

官网:www.qianju.net.cn


• 北京金龙翌阳科技发展有限公司(北京)

北京市海淀区大柳树路17号富海大厦2001室

邮编:100086

电话:010-62167379/6213538

邮箱:zhy@yy17.com

官网:www.yy17.com


• 厦门同昌源电子有限公司(厦门)

厦门市湖里区悦华路215号综合楼二楼C单元

邮编:361000

电话:0592-5663715

传真:0592-2236795

邮箱:tcydz@xmtcy.com

官网:www.xmjns.com


• 合肥新普仪测科技有限公司(合肥)

安徽省合肥市长江路53号长江大厦1102室

邮编:230001

电话:+86(0551)65177518 ext:

传真:+86(0551)6260 7155

邮箱:hfsimple@mail.hf.ah.cn

官网:www.hfxp.com.cn


• 品展国际贸易(上海)有限公司(上海)

上海外高桥保税区泰谷路18号1号楼1105A室

邮编:200003

电话:+86(0512) 6808 6023

传真:+86(0512) 6808 6025

邮箱:melody@chtek.com.tw

官网:chtek.com.tw


• 广州康祺科技发展有限公司(广州)

广州市天河区华强路1号珠控国际中心8层06单元

邮编:510623

电话:020-38295200

传真:020-38295122

邮箱:baobao@kontchi.com

官网:www.kontchi.com


• 广州科欣仪器有限公司(广州)

广州市黄埔区黄埔大道933号209室

邮编:510700

电话:86-20-38699788

传真:86-20-34395932

邮箱:cs@gzkexin.com.cn

官网:www.gzkexin.com.cn


• 成都安诚迅飞电子科技有限公司(成都)

成都市武侯区人民南路四段27号1栋1单元 24层3号

邮编:610041

电话:028-86027579

邮箱:jincai.he@ancentest.com

官网:www.ancentest.com


• 新亚制程(浙江)股份有限公司(深圳)

深圳市福田区中康路卓越城梅林中心广场(北区)一期1栋3楼

邮编:518035

电话:0755-23818536

传真:0755-23818625

邮箱:wangrongbin@sunyes.cn

官网:www.sunyes.cn


• 无锡市邦达测量科技有限公司(无锡)

江苏省无锡市新区长江北路112号

邮编:214028

电话:0510-85258521 ext:

邮箱:bdyiqi@bdyiqi.com

官网:www.bdyiqi.com


• 武汉力德仪测科技有限公司(武汉)

武汉市光谷大道54号国际企业中心四期A座501室

邮编:430074

电话:027-85481090 ext:

邮箱:liuyang@leader-e.com

官网:www.leader-e.com


• 苏州工业园区贝奇仪器有限公司(苏州)

苏州工业园区通园路398号海逸大厦A402室

邮编:215006

电话:0512-62883832

邮箱:szbeiqi@szbeiqi.net

官网:www.szbeiqi.net


• 青岛鲁芯仪器有限公司(青岛)

青岛市福州北路135号鼎都1号写字楼328室

邮编:266007

电话:15953279543

传真:0532-80669058-830

邮箱:gaochangyuan@qdluxin.com

官网:www.qdluxin.com


• Avnet Electronics Marketing(Phoenix)

2211 South 47th Street

邮编:85034

电话:+65 6289 9164

邮箱:Josephine.Cheong@avnet.com

官网:OnlineSupportAsia@Avnet.com


• RFMW, Ltd.(San Jose)

188 Martinvale Lane

邮编:95119

电话:#09-129

邮箱:sales@rfmw.asia

官网:www.rfmw.com


• 沈阳实拓科技有限公司(沈阳)

沈阳市和平区三好街35号8层

邮编:110004

电话:024-23843636

传真:024-23905232

邮箱:lf@shituokeji.cn

官网:www.shituokeji.cn


• 領先科儀有限公司(香港)

新界荃灣海盛路3號TML廣場21樓B5室

邮编:.

电话:852-31523600

传真:852-31523608

邮箱:allenma@advanceinst.com

官网:www.advanceinst.com


租赁合作伙伴


• 深圳君鉴科技股份有限公司(深圳市)

光明街道观光路华强创意产业园3栋B座12楼光明新区

邮编:518107

电话:400-860-3035

邮箱:shichang@chrent.com

官网:www.chrent.com


• 益莱储(北京)检测设备租赁有限公司(北京市)

来广营高科技产业园区4号楼3层301朝阳区

邮编:100102

电话:400-819-2800

邮箱:jim.chen@electrorent.com

官网:www.electrorent.com/cn


• 北京东方中科集成科技股份有限公司科技租赁事业部(北京市)

北京市海淀区阜成路67号银都大厦12层

邮编:100142

电话:400-650-5566

传真:010-68728001

邮箱:wangml@oimec.com.cn

官网:www.dfzk.com/rent


• 客而禧设备租赁(上海)有限公司(Shanghai)

徐汇区古美路1515号19号楼903室

邮编:201102

电话:021-54453166

邮箱:krc@krcchina.com

官网:www.krcchina.com


• 深圳市瑞普高电子有限公司(深圳市)

天安云谷产业园一期3栋D座1505-1506龙岗区

邮编:518129

电话:0755-29050100

邮箱:rickluo@ruipugao.com

官网:www.ruipugao.com


• 苏州锦凡精密仪器科技有限公司(苏州)

苏州市高新区滨河路625号创业大厦5幢505

邮编:215011

电话:18914031336

邮箱:18914031336@jfsz.net


解决方案合作伙伴


• Tokyo Weld Co., Ltd.(Ota-ku)

2-28-1 Kitamagome

邮编:143-0021

电话:81-3-3775-4331

传真:81-3-3775-4359

邮箱:d-imai@tokyoweld.com

官网:www.tokyoweld.com


• 上海恒榉电子科技有限公司(Shanghai)

上海市奉贤区南桥镇西闸公路1036号3栋2层

邮编:201401

电话:18112779808

邮箱:salesvalue@everise-hj.com

官网:everise-hj.com


• 佳燁科技股份有限公司(Ghiatek)(桃園市龜山區)

光明街243巷2號

邮编:33372

电话:+886-3-350-9960

传真:+886-3-320-3475

邮箱:support@ghiatek.com

官网:www.ghiatek.com.tw


• 华美博科技(北京)有限公司(北京市)

蓝靛厂东路2号金源时代商务中心C座9A2海淀区

邮编:100097

电话:010-88598732

邮箱:sino@sino-microtech.com

官网:www.sino-microtech.com


• 和创联合科技(北京)有限公司(北京市)

中关村东路18号财智国际大厦A座1612海淀区

邮编:100083

电话:400 650 7802

邮箱:info@hisuntest.com

官网:www.hisuntest.com


• 昆山捷得立电子有限公司(昆山市)

登云路288号海创大厦C座25楼

邮编:215316

电话:0512-36831748

邮箱:sales@jiedeli-china.com

官网:www.jiedeli-china.com


• 深圳市捷泰普科技有限公司(深圳市)

宝安区西乡街道前进二路桃源居南面深圳市智汇创新中心A座216室

邮编:518126

电话:0755-83908488

邮箱:sales@jtptech.cn

官网:www.jtptech.cn


• 深圳市易捷测试技术有限公司(深圳市)

福虹路9号世贸广场C座1203室福田区

邮编:518033

电话:0755-83698930

邮箱:dongni.zhang@gbit.net.cn

官网:gbit.net.cn


• 深圳市泰仕捷科技有限公司(深圳市)

松岗大道7号汉海达大厦616室宝安区

邮编:518105

电话:0755-27128586

邮箱:riky.gua@tesijet.com

官网:www.tesijet.com


• 深圳市蓉声科技有限公司(深圳市)

福中路海连大厦连天阁 1103 室福田区

邮编:518033

电话:13828880571

邮箱:jiang.qian@radiation-test.com

官网:www.radiation-test.com


• 苏州伊欧陆系统集成有限公司(苏州)

星湖街218号生物纳米园A7楼305室苏州工业园区

邮编:215000

电话:4008808776

邮箱:info@eoulu.com

官网:www.eoulu.com


• EM Labs Inc.(Kobe)

1-4-13 Mizukasadori, Nagata

邮编:653-0842

电话:+81-50-5370-0262

邮箱:info@emlabs.jp

官网:www.emlabs.jp


• MPI Corporation(Chupei)

No. 155 Chungho Street

邮编:302

电话:+886-3-555-1771

传真:+886-3-551-8381

邮箱:info@mpi-corporation.com

官网:www.mpi-corporation.com/ast


• NOFFZ(Tönisvorst)

Vorster Strasse 238

邮编:47918

电话:+49 2151-99878-0

邮箱:info@noffz.com

官网:www.noffz.com


• Power Technology Solutions(Santa Clara)

3048 Scott Blvd

邮编:95054

电话:650-308-8091 ext:

传真:408-727-0827

邮箱:inquiries@pwrts.com

官网:www.pwrts.com


• Resillion(Hasselt)

Kempische Steenweg 303

邮编:3500

电话:+32 498 92 01 71

邮箱:global-ci-sales@resillion.com

官网:www.resillion.com


• Suzhou Link Ways Tech Co., Ltd.(Suzhou)

16F, Block B, Jin Shi Wang Hu Building, No. 18, Jia Rui alley, SIP

邮编:215021

电话:+86 512 6602 8998


• 上海凌测电子科技有限公司(上海)

峨山路91弄120号陆家嘴软件园8号楼401A室浦东新区

邮编:200127

电话:021-61090608

邮箱:yue.lin@merlintest.com.cn

官网:www.merlintest.com.cn


• 上海北汇信息科技有限公司(上海市)

秀路100号虹桥总部1号4号楼3C闵行区紫

邮编:201103

电话:021-34716271

邮箱:info@polelink.com

官网:polelink.com


• 上海怿星电子科技有限公司(上海市)

钦州北路1199号智汇园87号楼5F室徐汇区

邮编:200233

电话:021-64955659

邮箱:biz@e-planet.cn

官网:www.e-planet.cn


• 东昇电磁兼容技术(深圳)有限公司(深圳市)

福田中心区26-3路中国凤凰大厦2栋25G

邮编:518026

电话:0755-82792411

邮箱:sales@jstoyo.cn

官网:www.jstoyo.cn


• 南京派格测控科技有限公司(南京市)

建邺区建邺人才服务大厦16楼

邮编:210019

电话:4008920858

邮箱:sales@pgtec.cn

官网:pgtec.cn


• 南京纳特通信电子有限公司(南京市)

江宁开发区临淮街20号

邮编:210012

电话:025-84471796

邮箱:sales@rflight.cn

官网:www.rflight.cn


• 深圳市研辰科技有限公司(深圳市)

益田路3008号皇都广场C座2815室福田区

邮编:518048

电话:0755-82828703

邮箱:roger_huang@ascentest.com

官网:www.ascentest.com


原厂翻新与二手仪器


• 是德科技原厂二手仪器商城(Keysight Certified Pre-Owned):www.keysight.com/used/cn/zh/


• 原厂翻新仪器经与新品相同的最终测试与校准,原厂保修最长 5 年;享 40%–90% 折扣,另有线上 5% / 教育 15% 优惠


 

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